Perpendicular spin transfer torque memory (sttm) device having offset cells and method to form same

ABSTRACT

Perpendicular spin transfer torque memory (STTM) devices having offset cells and methods of fabricating perpendicular STTM devices having offset cells are described. For example, a spin torque transfer memory (STTM) array includes a first load line disposed above a substrate and having only a first STTM device. The STTM array also includes a second load line disposed above the substrate, adjacent the first load line, and having only a second STTM device, the second STTM device non-co-planar with the first STTM device.

TECHNICAL FIELD

Embodiments of the invention are in the field of memory devices and, inparticular, perpendicular spin transfer torque memory (STTM) deviceshaving offset cells and methods of fabricating perpendicular STTMdevices having offset cells.

BACKGROUND

For the past several decades, the scaling of features in integratedcircuits has been a driving force behind an ever-growing semiconductorindustry. Scaling to smaller and smaller features enables increaseddensities of functional units on the limited real estate ofsemiconductor chips. For example, shrinking transistor size allows forthe incorporation of an increased number of memory devices on a chip,lending to the fabrication of products with increased capacity. Thedrive for ever-more capacity, however, is not without issue. Thenecessity to optimize the performance of each device becomesincreasingly significant.

The operation of spin torque devices is based on the phenomenon of spintransfer torque. If a current of electrons is passed through amagnetization layer, called the fixed magnetic layer, it will come outspin polarized. With the passing of each qualified electron post thetunneling process through the dielectric layer, its spin (which isreferred to as “intrinsic” angular momentum of the electron) will impactthe magnetization in a next magnetic layer, called the free magneticlayer, causing a small change. Through the principal of conservation ofangular momentum, this results in a torque-causing precession ofmagnetization. Due to reflection of electrons, a torque is also exertedon the magnetization of an associated fixed magnetic layer, but thislayer is pinned. In the end, if the current exceeds a certain criticalvalue (given by damping caused by the magnetic material and itsenvironment), the direction of the magnetization of the free magneticlayer will be switched by a pulse of current, typically in less thanabout 10 nanoseconds. Magnetization of the fixed magnetic layer shouldremain unchanged since an associated current is below its threshold dueto geometry or due to an adjacent anti-ferromagnetic layer.

Spin-transfer torque can be used to flip the active elements in magneticrandom access memory. Spin-transfer torque memory, or STTM, has theadvantages of lower power consumption and better scalability overconventional magnetic random access memory (MRAM) which uses magneticfields to flip the active elements. However, significant improvementsare still needed in the area of STTM device manufacture and usage.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a plot showing the effect on magnetic field as a result ofscaling cell proximity in STTM arrays.

FIG. 1B is a plot showing the effect on required current as a result ofscaling cell proximity in STTM arrays.

FIG. 2A illustrates a cross-sectional view of a conventional array ofperpendicular STTM devices.

FIG. 2B illustrates a cross-sectional view of a staggered or offsetarray of perpendicular STTM devices, in accordance with an embodiment ofthe present invention.

FIGS. 3A-3I illustrate cross-sectional views of various operations in amethod of fabricating an array of perpendicular STTM devices, inaccordance with an embodiment of the present invention.

FIGS. 4A-4H illustrate cross-sectional views of various operations inanother method of fabricating an array of perpendicular STTM devices, inaccordance with another embodiment of the present invention.

FIG. 5 illustrates a cross-sectional view of a material layer stack fora perpendicular spin transfer torque memory (STTM) device, in accordancewith an embodiment of the present invention.

FIG. 6 illustrates a schematic of a spin transfer torque memory bit cellwhich includes a spin transfer torque element, in accordance with anembodiment of the present invention.

FIG. 7 illustrates a block diagram of an electronic system, inaccordance with an embodiment of the present invention.

FIG. 8 illustrates a computing device in accordance with oneimplementation of the invention.

DESCRIPTION OF THE EMBODIMENTS

Perpendicular spin transfer torque memory (STTM) devices having offsetcells and methods of fabricating perpendicular STTM devices withenhanced stability are described. In the following description, numerousspecific details are set forth, such as specific magnetic layerintegration and material regimes, in order to provide a thoroughunderstanding of embodiments of the present invention. It will beapparent to one skilled in the art that embodiments of the presentinvention may be practiced without these specific details. In otherinstances, well-known features, such as integrated circuit designlayouts, are not described in detail in order to not unnecessarilyobscure embodiments of the present invention. Furthermore, it is to beunderstood that the various embodiments shown in the Figures areillustrative representations and are not necessarily drawn to scale.

One or more embodiments described herein are directed to offset memorydevices for scaling of perpendicular STTM systems. Applications mayinclude use in embedded memory, embedded non-volatile memory (NVM),magnetic random access memory (MRAM), magnetic tunnel junction (MTJ)devices, NVM, perpendicular MTJ, STTM, and non-embedded or stand-alonememories. In an embodiment, stability in perpendicular STTM devices isachieved by vertically staggering adjacent cells in an array of STTMdevices, as is described in greater detail below.

One or more embodiments are directed to approaches for preventing ormitigating “crosstalk” such as from fringing fields in STTM arrays, and,additionally, to increasing packing density for such arrays. As STTMsare scaled to smaller and smaller dimensions, the spacing between theindividual memory cells is also typically scaled in lockstep. At acertain point (e.g., at a certain technology node), the spacing betweencells becomes so small that the fringing magnetic fields from one memorydevice can influence the behavior of its neighbor, causing reducedlifetimes and increased switching current thresholds.

As an example, FIGS. 1A and 1B are plots 100A and 100B, respectively,showing the effects on magnetic field and required current,respectively, as a result of scaling cell proximity in STTM arrays. Morespecifically, plots 100A and 100B correlate magnetic filed (H_(disturb);which is also an indication of the stability of the cell—the strongerHdisturb, the more stable the cell) or required junction current (whereJ_(C) is the critical current density to switch the device),respectively, as a function of cell spacing (Δd, in nanometers) forthree adjacent cells. Referring to plots 100A and 100B, as Δd isdecreased (from right to left), the properties of the central “victim”cell B is affected by the magnetic fields of aggressor cells A and C. Ifthe victim cell B is aligned anti-parallel with cells A and C (as is thecase of the top arrays 102A and 102B, respectively), the cell becomesharder to flip, and also harder to write to, as Δd is decreased. If thevictim cell B is aligned parallel with cells A and C (as is the case ofthe bottom arrays 104A and 104B, respectively), the cell becomes easierto flip, and also easier to write to, as Δd is decreased, andconsequently less stable.

The phenomena demonstrated in plots 100A and 100B illustrate an issuenot yet addressed in the art. One approach could be to shrink the sizeof each memory element so that the distance between the edges ofadjacent elements shrinks. However, shrinking the size also reduces thestability since stability decreases as volume of the element decreases.

In order to demonstrate relevant issues structurally, FIG. 2Aillustrates a cross-sectional view of a conventional array ofperpendicular STTM devices, while FIG. 2B illustrates a cross-sectionalview of a staggered or offset array of perpendicular STTM devices, inaccordance with an embodiment of the present invention.

Referring to FIG. 2A, a conventional array 200A of perpendicular STTMdevices 202A, 204A, 206A and 208A, for example, is disposed above abottom electrode 210A. The perpendicular STTM devices 202A, 204A, 206Aand 208A are coupled to the bottom electrode 210A through load lines212A (it is to be understood that although depicted as a commonelectrode for simplicity, it is to be understood that each device iscoupled to its own corresponding transistor electrode to form a 1T-1STTMcell). Each perpendicular STTM device 202A, 204A, 206A and 208A includesa fixed magnetic layer 214A, a tunnel oxide layer 216A, and a freemagnetic layer 218A. Furthermore, perpendicular STTM devices 202A, 204A,206A and 208A are all formed in the same plane (such as in a sameback-end interconnect level of an integrated circuit), with exemplarydistances between devices being approximately 10 nanometers, deviceswidths of approximately 40 nanometers, and load line to load linedistances (effectively pitch) of approximately 50 nanometers. In thearrangement 200A, a strong fringing field may interfere with theperformance of adjacent devices, as is depicted in FIG. 2A, since thespacing is only approximately 10 nanometers.

By contrast, referring to FIG. 2B, an offset array 200B of perpendicularSTTM devices 202B, 204B, 206B and 208B, for example, is disposed above abottom electrode 210B. The perpendicular STTM devices 202B, 204B, 206Band 208B are coupled to the bottom electrode 210B through load lines212B (it is to be understood that although depicted as a commonelectrode for simplicity, it is to be understood that each device iscoupled to its own corresponding transistor electrode to form a 1T-1STTMcell). Each perpendicular STTM device 202B, 204B, 206B and 208B includesa fixed magnetic layer 214B, a tunnel oxide layer 216B, and a freemagnetic layer 218B. However, different from array 200A, theperpendicular STTM devices 202B, 204B, 206B and 208B are formed in thetwo different planes, with adjacent devices being non-co-planar.Exemplary distances between devices for an array node comparable to 200Aremains at 10 nanometers. However, with a device width of approximately40 nanometers, the spacing between co-planar devices (e.g., 202B and206B are co-planar, while 204B and 208B are co-planar) is approximately60 nanometers. Exemplary load line to load line distances (effectivelypitch) of co-planar devices is thus approximately 100 nanometers. In anexemplary embodiment, the height of the offset between adjacent devicesis approximately 100 nanometers. In the arrangement 200B, both afringing field between co-planar devices (e.g., between devices 204B and208B) and a fringing field between adjacent devices (e.g., betweendevices 202B and 204B) may exist, as depicted in FIG. 2B. However, sincethe infringing fields are between offset adjacent devices or betweennon-adjacent co-planar devices, the fringing fields, if any, arerelatively weak. Since the fringing fields are weak, instabilitiesand/or switching current issues may be virtually eliminated.

Furthermore, in fabricating the array 200B, lithography constraints canbe reduced, as described in greater detail below in association withillustrative fabrication schemes, even though the density of the deviceswithin the array 200B is the same as for array 200A. For example, thedistance between two minimum spaced features is taken to beapproximately 50 nanometers for array 200A. With a 0.7× scaling factorbetween generations, for the layout of the array 200B (same memorydensity 200A), the cells can be laid out with 2 times greater minimumfeature lengths, or lithographic constraints from a technology 2generations older. That is, array 200A requires 2F patterning whilearray 200B requires only 4F patterning. With the issues facinglithography, fabrication of arrays such as array 200B leads to a greatlydecreased cost for this approach, despite the need to pattern on twodielectric layers, a trade-off described in greater detail below. In anembodiment, with an increase in distance between memory elements inarray 200B versus 200A, it is possible to trade-off some of the distancebetween memory elements for greater density. That is, increasing densitycan be achieved by reducing feature size from 4F (e.g., processdescribed in FIGS. 3A-3I) to 3F (e.g., process described in FIGS. 4A-4H)while maintaining a relatively large distance between memory elements(e.g., approximately 35 nanometers for an offset array versus 10nanometer for a conventional array). Such an approach effectivelyincreases density over co-planar arrays by 50%, while still benefitingfrom reduced fringing fields.

With respect to fabrication schemes, two illustrative examples areprovided below. In an example using a tight lithography approach, FIGS.3A-3I illustrate cross-sectional views of various operations in a methodof fabricating an array of perpendicular STTM devices, in accordancewith an embodiment of the present invention. In an example using arelaxed lithography approach, FIGS. 4A-4H illustrate cross-sectionalviews of various operations in another method of fabricating an array ofperpendicular STTM devices, in accordance with another embodiment of thepresent invention. Specific materials suitable for each scheme aredescribed below in association with FIG. 5.

In an aggressive lithography approach, referring to FIG. 3A, a materialstack 306 for forming magnetic tunnel junction (MTJ) includes a fixedmagnetic layer 308, a tunnel oxide layer 310 and a free magnetic layer312. The material stack 306 is formed above a plurality of load lines302 formed above a bottom electrode 300 (which may be formed above asubstrate, not shown; it is to be understood that although depicted as acommon electrode for simplicity, it is to be understood that each deviceis coupled to its own corresponding transistor electrode to form a1T-1STTM cell). An inter-dielectric layer 304 may be included betweenload lines 302, as depicted in FIG. 3A. Referring to FIG. 3B, thematerial stack 306 is patterned (e.g., by lithography and etchprocessing) to provide individual MTJs 306A and 306B. An additionalinter-layer dielectric layer 314 is formed on the individual MTJs 306Aand 306B, as depicted in FIG. 3C. Referring to FIG. 3D, via extensions316 are formed in inter-layer dielectric layer 314 to couple to everyother load line of the plurality of load lines 302. It is to beunderstood that since the ultimate load lines between individual MTJs306A and 306B are thus formed in two different patterning operations,misalignment may occur, e.g., at region 318. Additional vias 320 maythen be formed in inter-layer dielectric layer 314, alternating with viaextensions 316 and coupled to individual MTJs 306A and 306B, as depictedin FIG. 3E. Referring to FIG. 3F, a second material stack 322 forforming MTJs is formed on the via extensions 316 and vias 320. Thesecond material stack 322 includes a fixed magnetic layer 324, a tunneloxide layer 326 and a free magnetic layer 328. Referring to FIG. 3G, thematerial stack 322 is patterned (e.g., by lithography and etchprocessing) to provide individual MTJs 322A and 322B. An additionalinter-layer dielectric layer 324 is formed on the individual MTJs 322Aand 322B, as depicted in FIG. 3H. Referring to FIG. 3I, via extensions326 are formed in inter-layer dielectric layer 324 to couple to theindividual MTJs 322A and 322B or the vias 318. It is to be understoodthat since the ultimate load lines above individual MTJs 306A and 306Bare thus formed in two different patterning operations, misalignment mayoccur, e.g., at region 328.

In a relaxed lithography approach, referring to FIG. 4A, a materialstack 406 for forming magnetic tunnel junction (MTJ) includes a fixedmagnetic layer 408, a tunnel oxide layer 410 and a free magnetic layer412. The material stack 406 is formed above a plurality of load lines402 formed above a bottom electrode 400 (which may be formed above asubstrate, not shown; it is to be understood that although depicted as acommon electrode for simplicity, it is to be understood that each deviceis coupled to its own corresponding transistor electrode to form a1T-1STTM cell). An inter-dielectric layer 404 may be included betweenload lines 402, as depicted in FIG. 4A. Referring to FIG. 4B, thematerial stack 406 is patterned (e.g., by lithography and etchprocessing) to provide individual MTJs 406A and 406B. An additionalinter-layer dielectric layer 414 is formed on the individual MTJs 406Aand 406B, as depicted in FIG. 4C. Referring to FIG. 4D, additional loadlines 416 are formed in inter-layer dielectric layers 414 and 404 tocouple to the bottom electrode 400. Referring to FIG. 4E, a secondmaterial stack 422 for forming MTJs is formed on the load lines 416. Thesecond material stack 422 includes a fixed magnetic layer 424, a tunneloxide layer 426 and a free magnetic layer 428. Referring to FIG. 4F, thematerial stack 422 is patterned (e.g., by lithography and etchprocessing) to provide individual MTJs 422A and 422B. An additionalinter-layer dielectric layer 424 is formed on the individual MTJs 422Aand 422B, as depicted in FIG. 4G. Referring to FIG. 4H, vias 426 areformed in inter-layer dielectric layer 424 to couple to the individualMTJs 422A and 422B as well as the individual MTJs 406A and 406B.

It is to be understood that a staggered or offset array is to bedistinguished from a class of memory cells based on multi-level memory.In multi-level memory, more than one device is situated on each loadline. In an exemplary conventional implementation, two differentvertically arranged magnetic junctions act as a single cell for a singleload line, with 4 levels of resistance (0,0-0,1-1,0-1,1), rendering thearrangement a multi-level memory. Such a cell does not alleviate thefringing fields, however, since they are packed together densely. Mostimportantly, such a multi-level memory suffers from the difficulty ofseparating the 4 resistance levels (since the difference between thehigh and low of a single cell is not much greater than 2×). By contrast,embodiments described herein include only one device on each load line,with adjacent devices staggered from one another.

Furthermore, stability of each individual cell within an offsetarrangement as described is an additional important issue facing scalingof STTM based devices and memory arrays fabricated there from. Asscaling continues, the need for smaller memory elements to fit into ascaled cell size has driven the industry in the direction ofperpendicular STTMs, which have higher stability for small memoryelement sizes. In an embodiment, individual perpendicular STTM cells foruse in the above described offset arrangements are fabricated usinginterface tuning to derive a maximum amount of perpendicular strengthand, hence, stability from a material stack that includes magneticlayers.

As a foundation for illustrating approaches to perpendicular stabilitywithin an offset array of perpendicular cells, FIG. 5 illustrates across-sectional view of a material layer stack for a perpendicular spintransfer torque memory (STTM) device, in accordance with an embodimentof the present invention. Referring to FIG. 5, a material layer stack500 for a perpendicular STTM device includes a bottom electrode 502, afixed magnetic layer 506, a dielectric layer 508, a free magnetic layer510, and a top electrode 512. A magnetic tunnel junction (MTJ) portionof the material layer stack 500 includes the fixed magnetic layer 506,the dielectric layer 508, and the free magnetic layer 510. Materialstack 500 is a basic material stack for fabricating perpendicular STTMs,and may be fabricated with greater complexity. For example, although notshown in the stack 500, an anti-ferromagnetic layer may also be includedin position 504, i.e., between bottom electrode 502 and fixed magneticlayer 506. Additionally, electrodes 502 and 512 may themselves includemultiple layers of material with differing properties. The materialstack shown in FIG. 5 may, in its most basic form, be a perpendicularsystem, where spins of the magnetic layer 506 and 510 are perpendicularto the plane of the layers themselves, as illustrated by 520 in FIG. 5.

Without further engineering, the material stack 500 of FIG. 5 istypically an in-plane spin system. However, with layer or interfaceengineering, the material stack may be fabricated to provide aperpendicular spin system. In a first example, referring again to thefeatures of material stack 500 as a platform, a free magnetic layer 510,e.g., a free magnetic layer composed of CoFeB, is thinned down from aconventional thickness used for in-plane STTM devices. The extent ofthinning may be sufficient such that a perpendicular component obtainedfrom the iron (Fe) in the layer 510 interacting with oxygen in thedielectric layer 508 (e.g., interacting with a magnesium oxide (MgO)layer 108 at interface 1 of FIG. 5) dominates over the in-planecomponent of the free CoFeB layer 510. This example provides aperpendicular system based on a single layer system of coupling to oneinterface of the free layer (i.e., the CoFeB—MgO interface). The degreeof oxidation of surface iron atoms (Fe) in the CoFeB layer by oxygenfrom the MgO layer provides the strength (stability) of the free layerto have perpendicular-dominated spin states. In this example, electrodes502 and 512 are composed of a single metal such as tantalum (Ta).

In a second example, referring again to the features of material stack500 as a platform, top electrode 512 is replaced with a multi-layerstack electrode of alternating magnetic (e.g., cobalt (Co)) andnon-magnetic layers (e.g., palladium (Pd)). Such a multi-layer schemeprovides that each magnetic thin film layer (Co) has an interface whichis perpendicular in spin direction. The final (bottom) Co layer in thisstack, e.g., the Co layer that is on free layer 510 and forms interface2, couples magnetically to the underlying CoFeB free layer 510. The sumof all the interfaces (starting with interface 2) in the electrode 512having alternating magnetic and non-magnetic layers in the full freelayer and, possibly, in addition to interface 1, renders stability forthe material of the free layer 510 to be perpendicular. That is, forthis second example, stability drivers for a perpendicular spin deviceinclude a combination of the MgO coupling of the first example (i.e.,from interface 1) as previously described, plus additional couplinginterface 2 of the free layer 510 to an upper perpendicular magnet.

In a third example, referring again to the features of material stack500 as a platform, a structure similar to the first example is provided.However, an additional tunneling barrier filter layer (e.g., a secondMgO layer) is added to the stack at position 530, shown in FIG. 5. Theinclusion of a second MgO layer allows oxygen from such a top MgO layerto interact with (e.g., oxidize) the Fe in at the top of the CoFeB freelayer 510, practically doubling the stability of the cell over the firstexample. However, as attractive as this approach is, there may be atrade-off with the addition of a second MgO layer in the stack 500.Namely, such a second MgO layer is in reality a thin dielectric filmwhich can increase the resistance of the resulting stack considerably.The resistance may increase to the point that it interferes with theability to detect the difference between a ‘1’ state and a ‘0’ state,the detecting described in greater detail below.

Referring again to FIG. 5, in an embodiment, the fixed magnetic layer506 is composed of a material or stack of materials suitable formaintaining a fixed majority spin. Thus, the fixed magnetic layer 506(or reference layer) may be referred to as a ferromagnetic layer. In oneembodiment, the fixed magnetic layer 506 is composed of a single layerof cobalt iron boride (CoFeB). However, in another embodiment, the fixedmagnetic layer 506 is composed of a cobalt iron boride (CoFeB) layer,ruthenium (Ru) layer, cobalt iron boride (CoFeB) layer stack. In aspecific such embodiment, the fixed magnetic layer is in the form of asynthetic antiferromagnet (SAF). From a top down perspective, the stackis a CoFeB/Ru/CoFe stack (e.g., no boron in the bottom layer, but theremay be in other embodiments). It is to be understood that Ru thicknessis very specific, e.g., 8-9 Angstroms such that the coupling between theCoFeB and the CoFe is anti-ferromagnetic; they point in oppositedirections.

Referring again to FIG. 5, in an embodiment, the dielectric layer 508 iscomposed of a material suitable for allowing current of a majority spinto pass through the layer, while impeding at least to some extentcurrent of a minority spin to pass through the layer. Thus, thedielectric layer 508 (or spin filter layer) may be referred to as atunneling layer. In one embodiment, the dielectric layer 508 is composedof a material such as, but not limited to, magnesium oxide (MgO) oraluminum oxide (Al₂O₃). In one embodiment, the dielectric layer 508 hasa thickness of approximately 1 nanometer.

Referring again to FIG. 5, in an embodiment, the free magnetic layer 510is composed of a material suitable for transitioning between a majorityspin and a minority spin, depending on the application. Thus, the freemagnetic layer 510 (or memory layer) may be referred to as aferromagnetic memory layer. In one embodiment, the free magnetic layer510 is composed of a layer of cobalt iron (CoFe) or cobalt iron boride(CoFeB).

Referring again to FIG. 5, in an embodiment, the bottom electrode 502 iscomposed of a material or stack of materials suitable for electricallycontacting the fixed magnetic layer side of a STTM device. In anembodiment, the bottom electrode 502 is a topographically smoothelectrode. In one such embodiment, the bottom electrode 502 has athickness suitable for good conductivity but has little to no columnarstructure formation that would otherwise lead to a rough top surface.Such a topographically smooth electrode may be referred to as amorphousin structure. In a specific embodiment, the bottom electrode is composedof Ru layers interleaved with Ta layers. Effectively, in accordance withan embodiment of the present invention, the bottom electrode 502 may notbe a conventional thick single metal electrode, such as a Ru electrode,but is instead a Ru/Ta interleaved materials stack. In alternativeembodiments, however, the bottom electrode 502 is a conventional thicksingle metal electrode, such as a Ru electrode.

In an embodiment, the top electrode 512 is composed of a material orstack of materials suitable for electrically contacting the freemagnetic layer side of a STTM device. In one embodiment, the topelectrode 512 is composed of a ruthenium (Ru) layer and contact metallayer stack. The ruthenium layer may be included to prevent oxygenmigration into the free magnetic layer 510. The metal contact layer mayprovide a low resistance path for conduction of current, and may becomposed of material such as, but not limited to, copper, aluminum,nickel, and cobalt. In another embodiment, the top electrode 512 may becomposed of essentially the same material stack as bottom electrode 502,e.g., as an interleaved and amorphous, thick, conductive stack.

Referring again to FIG. 5, in an embodiment, if included, theanti-ferromagnetic layer 504 is composed of a material suitable tofacilitate locking of the spins in an adjacent fixed magnetic layer,such as fixed magnetic layer 506. In one embodiment, theanti-ferromagnetic layer 504 is composed of a material such as, but notlimited to, iridium manganese (IrMn) or platinum manganese (PtMn).

In an embodiment, as described in additional detail later in associationwith FIG. 6, a non-volatile memory device includes a first electrode anda fixed magnetic layer disposed above the first electrode. A freemagnetic layer is disposed above the fixed magnetic layer, and a secondelectrode is disposed above the free magnetic layer. A dielectric layeris disposed between the free magnetic layer and the fixed magneticlayer. The second electrode is adjacent the free magnetic layer. Thenon-volatile memory device also includes a transistor electricallyconnected to the free magnetic layer electrode, a source line, and aword line. In one embodiment, the non-volatile memory device furtherincludes an anti-ferromagnetic layer disposed between the fixed magneticlayer and the first electrode.

In certain aspects and at least some embodiments of the presentinvention, certain terms hold certain definable meanings. For example, a“free” magnetic layer is a magnetic layer storing a computationalvariable. A “fixed” magnetic layer is a magnetic layer with permanentmagnetization. A tunneling barrier, such as a tunneling dielectric ortunneling oxide, is one located between free and fixed magnetic layers.A fixed magnetic layer may be patterned to create inputs and outputs toan associated circuit. Magnetization may be written by spin transfertorque effect while passing a current through the input electrodes.Magnetization may be read via the tunneling magneto-resistance effectwhile applying voltage to the output electrodes. In an embodiment, therole of the dielectric layer 508 is to cause a large magneto-resistanceratio. The magneto-resistance is the ratio of the difference betweenresistances when the two ferromagnetic layers have anti-parallel andparallel magnetization and the resistance of the state with the parallelmagnetization.

Referring again to FIG. 5, the portion of the spin transfer torqueelement 500 including the free magnetic layer 510, the tunneling barrierlayer 508, and the fixed magnetic layer 506 is known as a magnetictunneling junction. The free magnetic layer 510 and the fixed magneticlayer 506 may be ferromagnetic layers which are able to hold a magneticfield or polarization. However, the fixed magnetic layer 506 isconfigured to hold the majority spin state (e.g., depicted as spin upfor a perpendicular spin state). The tunneling barrier layer 508, whichseparates the free magnetic layer 510 and the fixed magnetic layer 506,may have a thickness, e.g. a distance between the free magnetic layer510 and the fixed magnetic layer 506 of about 1 nanometer or less, suchthat electrons can tunnel there through, if a bias voltage is appliedbetween the free magnetic layer electrode 512 and the fixed magneticlayer electrode 502.

In an embodiment, the MTJ functions essentially as a resistor, where theresistance of an electrical path through the MTJ may exist in tworesistive states, either “high” or “low,” depending on the relativedirections or orientations of magnetization in the free magnetic layer510 and in the fixed magnetic layer 506. Referring to FIG. 5, in thecase that the spin direction is to the down (minority) in the freemagnetic layer 510, a high resistive state exists, wherein direction ofmagnetization in the free magnetic layer 510 and the fixed magneticlayer 506 are substantially opposed or anti-parallel with one another.Referring again to FIG. 5, in the case that the spin direction is up(majority) in the free magnetic layer 510, a low resistive state exists,wherein the direction of magnetization in the free magnetic layer 510and the fixed magnetic layer 506 is substantially aligned or parallelwith one another. It is to be understood that the terms “low” and “high”with regard to the resistive state of the MTJ are relative to oneanother. In other words, the high resistive state is merely a detectiblyhigher resistance than the low resistive state, and vice versa. Thus,with a detectible difference in resistance, the low and high resistivestates can represent different bits of information (i.e. a “0” or a“1”).

The direction of magnetization in the free magnetic layer 510 may beswitched through a process call spin transfer torque (“STT”) using aspin-polarized current. An electrical current is generally non-polarized(e.g. consisting of about 50% spin-up and about 50% spin-downelectrons). A spin polarized current is one with a greater number ofelectrons of either spin-up or spin-down, which may be generated bypassing a current through the fixed magnetic layer 506. The electrons ofthe spin polarized current from the fixed magnetic layer 506 tunnelthrough the tunneling barrier or dielectric layer 508 and transfers itsspin angular momentum to the free magnetic layer 510, wherein the freemagnetic layer 510 will orient its magnetic direction from anti-parallelto that of the fixed magnetic layer 506 or parallel. The free magneticlayer 510 may be returned to its original orientation by reversing thecurrent.

Thus, the MTJ may store a single bit of information (“0” or “1”) by itsstate of magnetization. The information stored in the MTJ is sensed bydriving a current through the MTJ. The free magnetic layer 510 does notrequire power to retain its magnetic orientations. As such, the state ofthe MTJ is preserved when power to the device is removed. Therefore, aspin transfer torque memory bit cell composed of the stack 500 of FIG. 5is, in an embodiment, non-volatile.

Although the method of fabricating the stack of layers 500 for, e.g., aspin transfer torque memory bit cell has not been described completedetail herein, it is understood that the steps for fabrication mayinclude standard microelectronic fabrication processes such aslithography, etch, thin films deposition, planarization (such aschemical mechanical polishing (CMP)), diffusion, metrology, the use ofsacrificial layers, the use of etch stop layers, the use ofplanarization stop layers, and/or any other associated action withmicroelectronic component fabrication.

In accordance with another embodiment of the present invention, one ofthe fixed magnetic layer 506, the free magnetic layer 510, or both,includes a half-metal material layer. In a first example, in oneembodiment, a half-metal material layer is included at the fixedmagnetic layer 506 and dielectric layer 508 interface. In a specificsuch embodiment, the fixed magnetic layer 506 is a single layer composedof the half-metal material. However, in another specific embodiment,only a portion of the fixed magnetic layer 506 is composed of thehalf-metal material. In a second example, in another embodiment, ahalf-metal material layer is included at the free magnetic layer 510 anddielectric layer 508 interface. In a specific such embodiment, the freemagnetic layer 510 is a single layer composed of the half-metalmaterial. However, in another specific embodiment, only a portion of thefree magnetic layer 510 is composed of the half-metal material, e.g., asa sub-layer at the interface with the dielectric layer 508. In a thirdexample, in yet another embodiment, a first half-metal material layer isincluded at the fixed magnetic layer 506 and dielectric layer 508interface and a second half-metal material layer is included at the freemagnetic layer 510 and dielectric layer 508 interface. In an embodiment,half-metals (e.g. Heusler alloys) are included to increase thedifference between anti-parallel resistance (RAP) and parallelresistance (RP) (i.e. AR) in magnetic tunneling junction (MTJ) devices.

In an embodiment, the half-metal material layers described above arereferred to as a Heusler alloy, which is a ferromagnetic metal alloybased on a Heusler phase. Heusler phases may be intermetallics withparticular composition and face-centered cubic crystal structure. Thematerials are ferromagnetic, even though the constituting elements arenot, as a result of the double-exchange mechanism between neighboringmagnetic ions. The materials usually include manganese ions, which sitat the body centers of the cubic structure and carry most of themagnetic moment of the alloy. In a specific embodiment, the half-metalmaterial layer included in either the fixed magnetic layer 506, the freemagnetic layer 510, or both, are material layers such as, but notlimited to, Cu₂MnAl, Cu₂MnIn, Cu₂MnSn, Ni₂MnAl, Ni₂MnIn, Ni₂MnSn,Ni₂MnSb, Ni₂MnGa, Co₂MnAl, Co₂MnSi, Co₂MnGa, Co₂MnGe, Pd₂MnAl, Pd₂MnIn,Pd₂MnSn, Pd₂MnSb, Co₂FeSi, Fe₃Si, Fe₂Val, Mn₂VGa, or Co₂FeGe.

Referring again to the description associated with FIG. 5, a stack oflayers including magnetic material layers, e.g., which are used in amagnetic tunneling junction, may be used to fabricate a memory bit cell.For example, FIG. 6 illustrates a schematic of a spin transfer torquememory bit cell 600 which includes a spin transfer torque element 610,in accordance with an embodiment of the present invention.

Referring to FIG. 6, the spin transfer torque element 610 may include afree magnetic layer electrode 612 with a free magnetic layer 614adjacent the free magnetic layer electrode 612, a fixed magnetic layerelectrode 616 adjacent a fixed magnetic layer 618, and a tunnelingbarrier or dielectric layer 622 disposed between the free magnetic layer614 and the fixed magnetic layer 618. In an embodiment, the spintransfer torque element 610 is based on perpendicular magnetism.

A first dielectric element 623 and a second dielectric element 624 maybe formed adjacent the fixed magnetic layer electrode 616, the fixedmagnetic layer 618, and the tunneling barrier or dielectric layer 522.The fixed magnetic layer electrode 516 may be electrically connected toa bit line 632. The free magnetic layer electrode 612 may be coupledwith a transistor 634. The transistor 634 may be coupled with a wordline 636 and a source line 638 in a manner that will be understood tothose skilled in the art. The spin transfer torque memory bit cell 600may further include additional read and write circuitry (not shown), asense amplifier (not shown), a bit line reference (not shown), and thelike, as will be understood by those skilled in the art, for theoperation of the spin transfer torque memory bit cell 600. It is to beunderstood that a plurality of the spin transfer torque memory bit cells600 may be operably connected to one another to form a memory array (notshown), wherein the memory array can be incorporated into a non-volatilememory device. It is to be understood that the transistor 634 may beconnected to the fixed magnetic layer electrode 616 or the free magneticlayer electrode 512, although only the latter is shown.

FIG. 7 illustrates a block diagram of an electronic system 700, inaccordance with an embodiment of the present invention. The electronicsystem 700 can correspond to, for example, a portable system, a computersystem, a process control system, or any other system that utilizes aprocessor and an associated memory. The electronic system 700 mayinclude a microprocessor 702 (having a processor 704 and control unit706), a memory device 708, and an input/output device 710 (it is to beunderstood that the electronic system 700 may have a plurality ofprocessors, control units, memory device units and/or input/outputdevices in various embodiments). In one embodiment, the electronicsystem 700 has a set of instructions that define operations which are tobe performed on data by the processor 704, as well as, othertransactions between the processor 704, the memory device 708, and theinput/output device 710. The control unit 706 coordinates the operationsof the processor 704, the memory device 708 and the input/output device710 by cycling through a set of operations that cause instructions to beretrieved from the memory device 708 and executed. The memory device 708can include a spin transfer torque element as described in the presentdescription. In an embodiment, the memory device 708 is embedded in themicroprocessor 702, as depicted in FIG. 7.

FIG. 8 illustrates a computing device 800 in accordance with oneimplementation of the invention. The computing device 800 houses a board802. The board 802 may include a number of components, including but notlimited to a processor 804 and at least one communication chip 806. Theprocessor 804 is physically and electrically coupled to the board 802.In some implementations the at least one communication chip 806 is alsophysically and electrically coupled to the board 802. In furtherimplementations, the communication chip 806 is part of the processor804.

Depending on its applications, computing device 800 may include othercomponents that may or may not be physically and electrically coupled tothe board 802. These other components include, but are not limited to,volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flashmemory, a graphics processor, a digital signal processor, a cryptoprocessor, a chipset, an antenna, a display, a touchscreen display, atouchscreen controller, a battery, an audio codec, a video codec, apower amplifier, a global positioning system (GPS) device, a compass, anaccelerometer, a gyroscope, a speaker, a camera, and a mass storagedevice (such as hard disk drive, compact disk (CD), digital versatiledisk (DVD), and so forth).

The communication chip 806 enables wireless communications for thetransfer of data to and from the computing device 800. The term“wireless” and its derivatives may be used to describe circuits,devices, systems, methods, techniques, communications channels, etc.,that may communicate data through the use of modulated electromagneticradiation through a non-solid medium. The term does not imply that theassociated devices do not contain any wires, although in someembodiments they might not. The communication chip 806 may implement anyof a number of wireless standards or protocols, including but notlimited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE,GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well asany other wireless protocols that are designated as 3G, 4G, 5G, andbeyond. The computing device 800 may include a plurality ofcommunication chips 806. For instance, a first communication chip 806may be dedicated to shorter range wireless communications such as Wi-Fiand Bluetooth and a second communication chip 806 may be dedicated tolonger range wireless communications such as GPS, EDGE, GPRS, CDMA,WiMAX, LTE, Ev-DO, and others.

The processor 804 of the computing device 800 includes an integratedcircuit die packaged within the processor 804. In some implementationsof the invention, the integrated circuit die of the processor includesone or more devices, such as spin transfer torque memory built inaccordance with implementations of the invention. The term “processor”may refer to any device or portion of a device that processes electronicdata from registers and/or memory to transform that electronic data intoother electronic data that may be stored in registers and/or memory.

The communication chip 806 also includes an integrated circuit diepackaged within the communication chip 806. In accordance with anotherimplementation of the invention, the integrated circuit die of thecommunication chip includes one or more devices, such as spin transfertorque memory built in accordance with implementations of the invention.

In further implementations, another component housed within thecomputing device 800 may contain an integrated circuit die that includesone or more devices, such as spin transfer torque memory built inaccordance with implementations of the invention.

In various implementations, the computing device 800 may be a laptop, anetbook, a notebook, an ultrabook, a smartphone, a tablet, a personaldigital assistant (PDA), an ultra mobile PC, a mobile phone, a desktopcomputer, a server, a printer, a scanner, a monitor, a set-top box, anentertainment control unit, a digital camera, a portable music player,or a digital video recorder. In further implementations, the computingdevice 800 may be any other electronic device that processes data.

Accordingly, one or more embodiments of the present invention relategenerally to the fabrication of microelectronic memory. Themicroelectronic memory may be non-volatile, wherein the memory canretain stored information even when not powered. One or more,embodiments of the present invention relate to the fabrication of aperpendicular spin transfer torque memory element for non-volatilemicroelectronic memory devices. Such an element may be used in anembedded non-volatile memory, either for its non-volatility, or as areplacement for embedded dynamic random access memory (eDRAM). Forexample, such an element may be used for 1T-1× memory (X=capacitor orresistor) at competitive cell sizes within a given technology node.

Thus, embodiments of the present invention include perpendicular spintransfer torque memory (STTM) devices having offset cells and methods offabricating perpendicular STTM devices having offset cells.

In an embodiment, a spin torque transfer memory (STTM) array includes afirst load line disposed above a substrate and having only a first STTMdevice. The STTM array also includes a second load line disposed abovethe substrate, adjacent the first load line, and having only a secondSTTM device, the second STTM device non-co-planar with the first STTMdevice.

In one embodiment, the first and second STTM devices are perpendicularSTTM devices.

In one embodiment, the first and second STTM devices are coupled by afringing field, the fringing field a weak fringing field.

In one embodiment, the STTM array further includes a third load linedisposed above the substrate, adjacent the second load line but notadjacent the first load line, and having only a third STTM device, thethird STTM device non-co-planar with the second STTM device andco-planar with the first STTM device.

In one embodiment, the first and third STTM devices are coupled by afringing field, the fringing field a weak fringing field.

In one embodiment, the STTM array further includes a fourth load linedisposed above the substrate, adjacent the third load line but notadjacent the first or second load lines, and having only a fourth STTMdevice, the fourth STTM device non-co-planar with the third STTM deviceand co-planar with the second STTM device.

In one embodiment, the first, second, third, and fourth STTM devices arecoupled to corresponding transistor contacts disposed above thesubstrate but below the first, second, third, and fourth STTM devices.

In one embodiment, each of the first and second STTM devices has awidth, and the first and second STTM devices are laterally spaced fromone another by an amount less than the width.

In one embodiment, the first and second STTM devices are offset by anamount greater than the width in a direction perpendicular to thesubstrate.

In one embodiment, each of the first and second STTM devices has a widthof approximately 40 nanometers, and the first and second STTM devicesare laterally spaced from one another by a distance of approximately 10nanometers.

In one embodiment, the first and second STTM devices are offset by anamount of approximately 100 nanometers in a direction perpendicular tothe substrate.

In one embodiment, each of the first and third STTM devices has a widthof approximately 40 nanometers, and the first and third STTM devices arelaterally spaced from one another by a distance of approximately 60nanometers.

In one embodiment, each STTM device includes a free magnetic layerincluding iron (Fe) atoms, and includes a dielectric layer composed ofmagnesium oxide (MgO) below the free magnetic layer. At least a portionof the Fe atoms at an interface between the dielectric layer and thefree magnetic layer are oxidized, and the interface between thedielectric layer and the free magnetic layer provides a perpendicularmagnetic component for the STTM device.

In one embodiment, each STTM device further includes one or more pairsof alternating magnetic and non-magnetic layers disposed above the freemagnetic layer, and an interface between the free magnetic layer and thepairs of alternating magnetic and non-magnetic layers provides a secondperpendicular magnetic component for the STTM device.

In an embodiment, a method of fabricating a spin torque transfer memory(STTM) array includes forming a plurality of load line lower portions ina dielectric layer disposed above a substrate, each of the load linelower portions coupled to a corresponding transistor contact. The methodalso includes forming a first plurality of STTM devices, one device foreach of alternating ones of the plurality of load line lower portions.The method also includes forming a plurality of load line upperportions, one upper portion for each of the remaining ones of theplurality of load line lower portions, each load line upper portionadjacent a device of the first plurality of STTM devices. The methodalso includes forming a second plurality of STTM devices, one device foreach of the load line upper portions, the devices of the secondplurality of STTM devices non-co-planar with the devices of the firstplurality of STTM devices.

In one embodiment, the method further includes forming a plurality ofvias above the first and second pluralities of STTM devices, one via foreach of the devices of the first and second pluralities of STTM devices.

In one embodiment, forming the first and second pluralities of STTMdevices involves forming perpendicular STTM devices.

In one embodiment, a pair of devices of the first plurality of STTMdevices is coupled by a fringing field, the fringing field a weakfringing field.

In one embodiment, a device of the first plurality of STTM devices and adevice of the second plurality of STTM devices are coupled by a fringingfield, the fringing field a weak fringing field.

In an embodiment, a method of fabricating a spin torque transfer memory(STTM) array includes forming a plurality of load line lower portions ina dielectric layer disposed above a substrate, each of the load linelower portions coupled to a corresponding transistor contact. The methodalso includes forming a first plurality of STTM devices, one device foreach of the plurality of load line lower portions. The method alsoincludes forming a plurality of load lines coupled to the correspondingtransistor contacts, each load line adjacent a device of the firstplurality of STTM devices. The method also includes forming a secondplurality of STTM devices, one device for each of the load lines, thedevices of the second plurality of STTM devices non-co-planar with thedevices of the first plurality of STTM devices.

In one embodiment, the method further includes forming a plurality ofvias above the first and second pluralities of STTM devices, one via foreach of the devices of the first and second pluralities of STTM devices.

In one embodiment, forming the first and second pluralities of STTMdevices involves forming perpendicular STTM devices.

In one embodiment, a pair of devices of the first plurality of STTMdevices is coupled by a fringing field, the fringing field a weakfringing field.

In one embodiment, a device of the first plurality of STTM devices and adevice of the second plurality of STTM devices are coupled by a fringingfield, the fringing field a weak fringing field.

In an embodiment, a method of fabricating non-self-aligned vias includesforming a first plurality of vias, forming a first plurality of STTMdevices above the first plurality of vias, depositing a dielectriclayer, forming a second plurality of vias contacting the first pluralityof STTM devices, forming a third plurality of vias contacting the firstplurality of vias between the first plurality of STTM devices, forming asecond plurality of STTM devices contacting the third plurality of vias,depositing a second dielectric layer, forming a fourth plurality of viascontacting the second plurality of STTM devices, and forming a fifthplurality of vias contacting the second plurality of vias.

In an embodiment, a method of fabricating self-aligned vias includesforming a first plurality of vias, forming a first plurality of STTMdevices above the first plurality of STTM devices, depositing adielectric layer, forming a second plurality of vias, contacting thefirst plurality of STTM devices, forming a third plurality of viascontacting a load line between the first plurality of STTM devices,forming a second plurality of STTM devices contacting the thirdplurality of vias, depositing a second dielectric layer, forming afourth plurality of vias contacting the first plurality of STTM devices,and forming a fifth plurality of vias contacting the second plurality ofSTTM devices.

1. A spin torque transfer memory (STTM) array, comprising: a first loadline disposed above a substrate and having only a first STTM device; asecond load line disposed above the substrate, adjacent the first loadline, and having only a second STTM device, the second STTM devicenon-co-planar with the first STTM device; a third load line disposedabove the substrate, adjacent the second load line but not adjacent thefirst load line, and having only a third STTM device, the third STTMdevice non-co-planar with the second STTM device and co-planar with thefirst STTM device, wherein the first and third STTM devices are coupledby a fringing field, the fringing field a weak fringing field.
 2. TheSTTM array of claim 1, wherein the first and second STTM devices areperpendicular STTM devices.
 3. The STTM array of claim 1, wherein thefirst and second STTM devices are coupled by a fringing field, thefringing field a weak fringing field. 4.-5. (canceled)
 6. The STTM arrayof claim 1, further comprising: a fourth load line disposed above thesubstrate, adjacent the third load line but not adjacent the first orsecond load lines, and having only a fourth STTM device, the fourth STTMdevice non-co-planar with the third STTM device and co-planar with thesecond STTM device.
 7. The STTM array of claim 6, wherein the first,second, third, and fourth STTM devices are coupled to a correspondingtransistor contact disposed above the substrate but below the first,second, third, and fourth STTM devices.
 8. The STTM array of claim 1,wherein each of the first and second STTM devices has a width, and thefirst and second STTM devices are laterally spaced from one another byan amount less than the width.
 9. The STTM array of claim 8, wherein thefirst and second STTM devices are offset by an amount greater than thewidth in a direction perpendicular to the substrate.
 10. The STTM arrayof claim 1, wherein each of the first and second STTM devices has awidth of approximately 40 nanometers, and the first and second STTMdevices are laterally spaced from one another by a distance ofapproximately 10 nanometers.
 11. The STTM array of claim 10, wherein thefirst and second STTM devices are offset by an amount of approximately100 nanometers in a direction perpendicular to the substrate.
 12. TheSTTM array of claim 4, wherein each of the first and third STTM deviceshas a width of approximately 40 nanometers, and the first and third STTMdevices are laterally spaced from one another by a distance ofapproximately 60 nanometers.
 13. The STTM array of claim 1, wherein eachSTTM device includes a free magnetic layer comprising iron (Fe) atoms,and includes a dielectric layer comprising magnesium oxide (MgO) belowthe free magnetic layer, wherein at least a portion of the Fe atoms atan interface between the dielectric layer and the free magnetic layerare oxidized, and the interface between the dielectric layer and thefree magnetic layer provides a perpendicular magnetic component for theSTTM device.
 14. The STTM array of claim 13, wherein each STTM devicefurther comprises one or more pairs of alternating magnetic andnon-magnetic layers disposed above the free magnetic layer, and whereinan interface between the free magnetic layer and the pairs ofalternating magnetic and non-magnetic layers provides a secondperpendicular magnetic component for the STTM device. 15.-24. (canceled)25. A spin torque transfer memory (STTM) array, comprising: a first loadline disposed above a substrate and having only a first STTM device; anda second load line disposed above the substrate, adjacent the first loadline, and having only a second STTM device, the second STTM devicenon-co-planar with the first STTM device, wherein each of the first andsecond STTM devices has a width, and the first and second STTM devicesare laterally spaced from one another by an amount less than the width,and wherein the first and second STTM devices are offset by an amountgreater than the width in a direction perpendicular to the substrate.26. The STTM array of claim 25, wherein the first and second STTMdevices are perpendicular STTM devices.
 27. The STTM array of claim 25,wherein the first and second STTM devices are coupled by a fringingfield, the fringing field a weak fringing field.
 28. The STTM array ofclaim 25, wherein each of the first and second STTM devices has a widthof approximately 40 nanometers, and the first and second STTM devicesare laterally spaced from one another by a distance of approximately 10nanometers.
 29. The STTM array of claim 28, wherein the first and secondSTTM devices are offset by an amount of approximately 100 nanometers ina direction perpendicular to the substrate.
 30. The STTM array of claim25, wherein each STTM device includes a free magnetic layer comprisingiron (Fe) atoms, and includes a dielectric layer comprising magnesiumoxide (MgO) below the free magnetic layer, wherein at least a portion ofthe Fe atoms at an interface between the dielectric layer and the freemagnetic layer are oxidized, and the interface between the dielectriclayer and the free magnetic layer provides a perpendicular magneticcomponent for the STTM device.
 31. The STTM array of claim 30, whereineach STTM device further comprises one or more pairs of alternatingmagnetic and non-magnetic layers disposed above the free magnetic layer,and wherein an interface between the free magnetic layer and the pairsof alternating magnetic and non-magnetic layers provides a secondperpendicular magnetic component for the STTM device.
 32. A spin torquetransfer memory (STTM) array, comprising: a first load line disposedabove a substrate and having only a first STTM device; and a second loadline disposed above the substrate, adjacent the first load line, andhaving only a second STTM device, the second STTM device non-co-planarwith the first STTM device, wherein each of the first and second STTMdevices has a width of approximately 40 nanometers, and the first andsecond STTM devices are laterally spaced from one another by a distanceof approximately 10 nanometers, and wherein the first and second STTMdevices are offset by an amount of approximately 100 nanometers in adirection perpendicular to the substrate.
 33. The STTM array of claim32, wherein the first and second STTM devices are perpendicular STTMdevices.
 34. The STTM array of claim 32, wherein the first and secondSTTM devices are coupled by a fringing field, the fringing field a weakfringing field.
 35. The STTM array of claim 32, wherein each STTM deviceincludes a free magnetic layer comprising iron (Fe) atoms, and includesa dielectric layer comprising magnesium oxide (MgO) below the freemagnetic layer, wherein at least a portion of the Fe atoms at aninterface between the dielectric layer and the free magnetic layer areoxidized, and the interface between the dielectric layer and the freemagnetic layer provides a perpendicular magnetic component for the STTMdevice.
 36. The STTM array of claim 35, wherein each STTM device furthercomprises one or more pairs of alternating magnetic and non-magneticlayers disposed above the free magnetic layer, and wherein an interfacebetween the free magnetic layer and the pairs of alternating magneticand non-magnetic layers provides a second perpendicular magneticcomponent for the STTM device.
 37. A spin torque transfer memory (STTM)array, comprising: a first load line disposed above a substrate andhaving only a first STTM device; and a second load line disposed abovethe substrate, adjacent the first load line, and having only a secondSTTM device, the second STTM device non-co-planar with the first STTMdevice, wherein each STTM device includes a free magnetic layercomprising iron (Fe) atoms, and includes a dielectric layer comprisingmagnesium oxide (MgO) below the free magnetic layer, wherein at least aportion of the Fe atoms at an interface between the dielectric layer andthe free magnetic layer are oxidized, and the interface between thedielectric layer and the free magnetic layer provides a perpendicularmagnetic component for the STTM device.
 38. The STTM array of claim 37,wherein the first and second STTM devices are perpendicular STTMdevices.
 39. The STTM array of claim 37, wherein the first and secondSTTM devices are coupled by a fringing field, the fringing field a weakfringing field.
 40. The STTM array of claim 37, wherein each STTM devicefurther comprises one or more pairs of alternating magnetic andnon-magnetic layers disposed above the free magnetic layer, and whereinan interface between the free magnetic layer and the pairs ofalternating magnetic and non-magnetic layers provides a secondperpendicular magnetic component for the STTM device.